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It is extracted from SiO2 (accounting for 60% of the lithosphere in forms of sand, rock, mineral, etc) , which is the second most plentiful
mineral on the earth followed by oxygen.
SOLMICS is the No.1 domestic manufacturer in business of semiconductor Si processed products since the processed products' price competitiveness
and quality are already proven, as well as silicon ingots. |
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Stably supplying materials
owing to plentiful amount |
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Less change of physical
and mechanical properties
according to temperature
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variation |
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Easy high purity process |
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Easy control of resistance
rate by purification and
impurities addition adjustment |
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*Si Focus Ring |
functionally aligning plasma
within a chamber after plasma
is formed |
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*Si Edge Ring |
aligning wafer accurately
and supplementing Si Focus
Ring, establishing plasma |
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*Other products |
Si-Source Ring, Si Inner
Ring, Si Slab, Si Heat Shield,
etc |
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Etching technology :
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Silicon has
a unique processing feature
by which surface |
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Impurities
are diffused as much of
the surface is processed |
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while etching
technology eliminates iron
content layer, which is
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created by
the heat generated due to
friction between tool and
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silicon during surface process.
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Polishing
technology : |
processing
silicon surface with mirror
plane. |
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Purity % |
99.99999999999 Non-dope |
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Bulk Density [g/cc] |
2.33 |
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Vickers Hardness [GPa] Load0.5Kg
HVI-9.807N |
10.2 |
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Bending Strength [MPa] |
~300 |
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Compressive Strength [Mpa] |
481~549
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Youngs Modulus [Gpa] |
190 |
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Poissons Ratio |
0.27
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Thermal Conductivity [W/mK] |
157 |
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Thermal Expansion [x10-6/¡ÆC]
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3.9 |
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Heat Shock Strength [¡âT¡ÆC] |
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Specific Heat [RT] (J/kg.K) |
0.7
x 103 |
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Max Useable Temperature
[¡ÆC] |
1300 |
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Volume Resistivity [§Ù. §¯] |
2.3 x 105 |
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Dielectric Strength [V/m] |
30x 106 |
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Dielectric Constant [25¡ÆC
1MHZ] |
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