Home → Product Info→ Precision Cleaning With our experience in fine ceramics parts/materials production, we can comprehend the characeristics of materials to clean and are fully equipped with a complete process from parts attachment/detachment to cleaning, inspection, re-attachment and process tuning. The unique cleaning feature of SOLMICS, CO2, cleaning at a very low temperature, RF plasma and wave plasma methods execute precision cleaning. Description Equipment Process Material Solution Belljar Endura5500 Pre Clean P II Quartz Wet+Plasma Lid-liner Endura-5500HP CVDTin Ceramic Wet+Dry Cathode Tel-8500 Oxide Si Dry