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Quartz
developed as high performance
lamp gy GE(General Electric)
is largely divided into
diffusion part and spare
part SOLMICS mainly produces
the latter one.
Although it is quick-consumed disadvantageously, it is continuously used for high
capacity wafer integration and large-sized LCD plate owing to its high purity and transparency. |
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High purity properties,excellent
electric insulation,low
expansion and less gas |
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Specific heat and conductivity
: transparent quartz glass
has 20~1,000 ¡ÆC specific
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heat
and 0~100(1.3~1.5 w/mk)¡ÆC
conductivity. |
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SOLMICS produces various shapes
of ring types necessary for spare
parts and secures a unique technologically
precise process. |
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Focus Ring |
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2-step
Ring |
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Belljar |
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Boat |
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Tube |
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Cap |
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Bath |
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Other products
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wide pockets,
shadow rings, base plates,
lifter pins, shield rings,
etc |
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Purity % |
99.99 |
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Bulk Density [g/cc] |
2.15~2.21 |
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Vickers Hardness [GPa] Load0.5Kg
HVI-9.807N |
8.6 |
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Bending Strength [MPa] |
70 |
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Compressive Strength [Mpa] |
>1100
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Youngs Modulus [Gpa] |
72 |
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Poissons Ratio |
0.17
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Thermal Conductivity [W/mK] |
1.5 |
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Thermal Expansion [x10-6/¡ÆC]
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0.5 |
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Heat Shock Strength [¡âT¡ÆC] |
>1000 |
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Specific Heat [RT] (J/kg.K) |
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Max Useable Temperature
[¡ÆC] |
1200(1350) |
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Volume Resistivity [§Ù. §¯] |
>1014 |
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Dielectric Strength [V/m] |
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Dielectric Constant [25¡ÆC
1MHZ] |
3.75 |
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