Home ¡æ Product Info¡æQuartz part
 
Quartz developed as high performance lamp gy GE(General Electric) is largely divided into diffusion part and spare part SOLMICS mainly produces the latter one.

Although it is quick-consumed disadvantageously, it is continuously used for high capacity wafer integration and large-sized LCD plate owing to its high purity and transparency.
High purity properties,excellent electric insulation,low expansion and less gas
content
Specific heat and conductivity : transparent quartz glass has 20~1,000 ¡ÆC specific
heat and 0~100(1.3~1.5 w/mk)¡ÆC conductivity.
SOLMICS produces various shapes of ring types necessary for spare parts and secures a unique technologically precise process.
Focus Ring
2-step Ring
Belljar
Boat
Tube
Cap
Bath
Other products : wide pockets, shadow rings, base plates, lifter pins, shield rings, etc
Purity % 99.99
Bulk Density [g/cc] 2.15~2.21
Vickers Hardness [GPa] Load0.5Kg HVI-9.807N 8.6
Bending Strength [MPa] 70
Compressive Strength [Mpa] >1100
Youngs Modulus [Gpa] 72
Poissons Ratio 0.17
Thermal Conductivity [W/mK] 1.5
Thermal Expansion [x10-6/¡ÆC] 0.5
Heat Shock Strength [¡âT¡ÆC] >1000
Specific Heat [RT] (J/kg.K)  
Max Useable Temperature [¡ÆC] 1200(1350)
Volume Resistivity [§Ù. §¯] >1014
Dielectric Strength [V/m]  
Dielectric Constant [25¡ÆC 1MHZ] 3.75